Toward milli-Newton electro- and magneto-static microactuators

Microtechnologies can potentially push integrated electro- and magnetostatic actuators toward the regime where constant forces in the order of milli-Newton (or torques in the order of micro-Newton meter) can be generated with constant inputs within a volume of 1.0 x 1.0 x 0.02 mm with 'conventional' technology. 'Micro' actuators are, by definition, actuators with dimensions confined within a millimeter cube. Integrated microactuators based on electrostatics typically have force/torque in the order of sub-micro-Newton (sub-nano-Newton meter). These devices are capable of moving small objects at MHz frequencies. On the other hand, suppose we want to move a one cubic millimeter object around with 100 G acceleration; a few milli-Newton force will be required. Thus, milli-Newton microactuators are very desirable for some immediate applications, and it challenges micromechanical researchers to develop new process technologies, designs, and materials toward this goal

IC-processed micro-motors: design, technology, and testing

Micro-motors having rotors with diameters between 60 and 120 μm have been fabricated and driven electrostatically to continuous rotation. These motors were built using processes derived from IC (integrated circuit) microcircuit fabrication techniques. Initial tests on the motors show that friction plays a dominant role in their dynamic behavior. Observed rotational speeds have thus far been limited to several hundred r.p.m., which is a small fraction of what would be achievable if only natural frequency were to limit the response. Experimental starting voltages are at least an order of magnitude larger than had been expected (60 V at minimum and above 100 V for some structures). Observations of asynchronous as well as synchronous rotation between the driving fields and the rotors can be explained in terms of the torque/rotor-angle characteristics for the motors

Integrated movable micromechanical structures for sensors and actuators

Movable pin-joints, gears, springs, cranks, and slider structures with dimensions measured in micrometers have been fabricated using silicon microfabrication technology. These micromechanical structures, which have important transducer applications, are batch-fabricated with an IC-compatible process. The movable mechanical elements are built on layers that are later removed so that they are freed for translation and rotation. An undercut-and-refill technique, which makes use of the high surface mobility of silicon atoms undergoing chemical vapor deposition, is used to refill undercut regions in order to form restraining flanges. Typical element sizes and masses are measured in micrometers and nanograms. The process provides the tiny structures in an assembled form avoiding the nearly impossible challenge of handling such small elements individually

Ceramic Nano-particle/Substrate Interface Bonding Formation Derived from Dynamic Mechanical Force at Room Temperature: HRTEM Examination

The bonding of TiO nano-particle/substrate is a critical factor influencing the performance of dye-sensitized solar cells. In order to reveal the bonding properties at TiO nano-particle/substrate interface, high-resolution transmission electron microscopy (HRTEM) analysis was adopted to TiO coatings prepared by three different approaches. In the HRTEM analysis, the effective bonding mode is allowed to distinguish from the false image overlapping. Results show that large areas of effective bonding between nano-TiO particles and the substrate surface formed in the room temperature cold sprayed coating and mechanically pressed coating, while only limited interface areas with the effective bonding were observed in the coating deposited by non-pressed method. These results confirm that both high impact pressure during the room temperature cold spraying and mechanical pressure contribute to the bonding formation at the particle/substrate interface

IC-processed electrostatic micro-motors

The authors describe the design, fabrication, and operation of several micromotors that have been produced using integrated-circuit processing. Both rotors and stators for these motors, which are driven by electrostatic forces, are formed from 1.0-1.5- µm-thick polycrystalline silicon. The diameters of the rotors in the motors tested are between 60 and 120 mu m. Motors with several friction-reducing designs have been fabricated using phosphosilicate glass (PSG) as a sacrificial material and either one or three polysilicon depositions. Examples of stepping and three-phase synchronous drive micromotors are described. Typical drive voltages for present designs exceed 100 V. Manually switched motors have tested at speeds up to 12 r.p.m. Synchronous motors have been driven at speeds to 500 r.p.m

Multi-Dimensional Refinement Graph Convolutional Network with Robust Decouple Loss for Fine-Grained Skeleton-Based Action Recognition

Graph convolutional networks have been widely used in skeleton-based action recognition. However, existing approaches are limited in fine-grained action recognition due to the similarity of inter-class data. Moreover, the noisy data from pose extraction increases the challenge of fine-grained recognition. In this work, we propose a flexible attention block called Channel-Variable Spatial-Temporal Attention (CVSTA) to enhance the discriminative power of spatial-temporal joints and obtain a more compact intra-class feature distribution. Based on CVSTA, we construct a Multi-Dimensional Refinement Graph Convolutional Network (MDR-GCN), which can improve the discrimination among channel-, joint- and frame-level features for fine-grained actions. Furthermore, we propose a Robust Decouple Loss (RDL), which significantly boosts the effect of the CVSTA and reduces the impact of noise. The proposed method combining MDR-GCN with RDL outperforms the known state-of-the-art skeleton-based approaches on fine-grained datasets, FineGym99 and FSD-10, and also on the coarse dataset NTU-RGB+D X-view version